“IEEE Transactions on Microwave Theory and Techniques”: A Chip-First Microwave Packaging Technique Based on Multi-Material Aerosol Jet Printing

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Equipment Parameters

I. Core Research Summary

This study, based on the Optomec Aerosol Jet 5X platform, innovatively implements an integrated chip-first packaging process. By simultaneously jetting multiple materials—including polyimide (PI), barium titanate‑based high‑dielectric‑constant ink, and silver conductive ink—it successfully fabricates a microwave package for a 5–20 GHz GaAs medium‑power amplifier with integrated bypass capacitors. Comprehensive validation is performed, encompassing small‑signal S‑parameters, large‑signal load‑pull measurements, and power/temperature cycling reliability tests. The key findings are as follows:
  • Chip-First Layer-by-Layer Conformal All-Additive Packaging Architecture

The bare die is mounted on a molybdenum–copper thermal‑matched substrate, and aerosol‑based printing is used to sequentially deposit a sloped transition layer, a high‑dielectric‑constant MIM capacitor dielectric, and RF microstrip lines, thereby directly fabricating a complete RF interconnect and filtering capacitance on the die surface, eliminating wire bonding and external chip‑mounted capacitors.

  • In-situ mixed BaTiO₃/PI nanocomposite dielectric, integrating high-capacitance MIM capacitors.

Two aerosol streams atomize PI and barium titanate inks, respectively, enabling in-situ mixing and forming a high‑dielectric‑constant thin film during printing. The resulting equivalent dielectric constant is 7.1, with a maximum capacitance of 28.43 pF per cell—representing the highest capacitance in the industry for this type of aerosol‑based capacitor—and it can be used directly as a bypass filter in power amplifiers.

  • Broadband, low-loss RF interconnects with performance comparable to bare chips.

At 5–20 GHz, the total package‑level insertion loss is less than 2.3 dB, with an average in‑band insertion loss of only 1.3 dB; the package delivers a maximum gain of 21.7 dB and a saturated output power of 21.9 dBm—performance that closely matches the manufacturer’s bare die specifications of 22 dB gain and 22 dBm saturation power, with virtually no degradation, significantly outperforming commercially available QFN packages.

  • High and low temperature, power cycling—high reliability and stability.

After 1,000 power cycling cycles and seven high–low temperature shock tests at 200°C, the RF gain and output power variations remain below 0.32 dB, with no cracking of the dielectric layer and no delamination of the silver traces, thereby meeting the stringent reliability requirements of military‑grade RF applications.

  • Single-device, multi-material monolithic molding; single‑package printing in just 100 minutes.

Pneumatic–ultrasonic dual‑atomization switching enables continuous printing of three types of inks—dielectric, high‑k composite, and conductive silver—eliminating the need for multiple lithography, coating, and chip‑mounting steps and boosting prototype‑iteration efficiency by 90%.

II. Complete Packaging Process Flow and Core Process Advantages for Aerosol Dispensing

(1) Complete Chip-First Microwave Package Fabrication Process

  • Polishing of MoCu carrier substrates, silver‑epoxy bonding in a nitrogen atmosphere, and bare‑die GaAs power amplifier HMC451.
  • A base coating adhesion promoter is applied, followed by pneumatic atomization of PI ink to print the base insulating layer.
  • Dual-channel aerosol simultaneous injection of PI and BaTiO₃ nanoinks, followed by in-situ mixing to form a high‑dielectric‑constant thin film, is used to fabricate the dielectric layer of MIM capacitors.
  • Print a 30°‑inclined PI fillet ramp to compensate for the height difference between the chip and the substrate, thereby achieving a smooth RF transition.
  • Ultrasonic atomization of silver nano‑ink enables multi‑angle printing of 50‑Ω microstrip and GSG coplanar waveguide RF circuits.
  • Segmented nitrogen‑based, stepped high‑temperature curing is applied to the dielectric and metal layers, completing an all‑additive, integrated power amplifier package.

(II) Five Major Process Advantages (Comparison of Gold Wire Bonding, LTCC, and Flip-Chip Technologies)

  • Gold‑free, low‑parasitic interconnects significantly reduce high‑frequency losses.

The arched gold wire is eliminated, and the chip pads are directly conformally connected to the microstrip plane, thereby eliminating lead‑induced parasitic inductance and significantly improving millimeter‑wave impedance matching performance above 18 GHz.

  • Multi-material in-situ composites, integrated bypass capacitors

The same device simultaneously blends high‑dielectric‑constant barium titanate with PI in real time, enabling direct in‑package molding of MIM filter capacitors and eliminating the need for chip mounting, pad fabrication, and reflow soldering, thereby reducing module size.

  • Conformal printing with irregular height differences, perfectly matching chip steps.

Aerosol jet printing offers a safe nozzle-to‑substrate distance of 1–5 mm, enables rounded‑corner slopes on inclined surfaces, and provides smooth transitions across height differences of several hundred micrometers between the chip and the substrate—capabilities that conventional planar lithography cannot achieve.

  • The thermal‑matching carrier board is designed for low‑temperature molding, ensuring no thermal damage to the chip.

The entire curing process operates at a maximum temperature of 295°C; when paired with a molybdenum–copper substrate featuring low thermal expansion, the GaAs chip avoids high‑temperature warping and performance degradation.

  • Digital, maskless rapid iteration has sharply reduced R&D costs.

Simply modify the capacitor dimensions, microstrip line widths, and ramp‑profile CAD files to re‑tool; by contrast, LTCC ceramic tooling typically takes several weeks, whereas aerosol‑based prototyping can produce revised samples on the same day.

III. Five Core Technological Innovations of This Study

Innovation 1: The world’s first Chip-First aerosol microwave fully encapsulated process.

Breaking with the traditional “substrate-first, chip‑on‑board” paradigm, this approach fixes the bare die first and then builds the complete RF circuit layer by layer through additive manufacturing, enabling an integrated package that combines active power amplifiers.

Innovation 2: Dual-Path In-Situ Mixing of Aerosol-Based High-Dielectric Nanocomposite Dielectrics

Two atomization channels separately deliver PI and BaTiO₃ aerosol streams, which are mixed in real time during the printing process—eliminating the need for pre‑mixing the ink—and enabling flexible tuning of the dielectric constant to fabricate high‑capacitance MIM filter capacitors.

Innovation 3: Multi-Angle Rounded-Slope Conformal Interconnect Technology

Aerosol‑based inclined‑path printing of a gradient PI transition layer eliminates RF step discontinuities at the chip edges, suppresses high‑frequency reflection losses, and resolves the issue of open circuits in lines with height differences.

Innovative 4‑channel broadband power amplifier integrated solution with no external capacitors

The module encapsulates an internal aerosol‑direct‑write bypass capacitor, eliminating the need to mount additional filtering components and significantly boosting system integration; its footprint is smaller than that of a comparable commercial QFN package.

Innovative dual-loop verification of additive‑packaging reliability, incorporating both power and thermal metrics.

Innovatively completed high-temperature shock and 10,000-cycle power‑aging tests for aerosol RF packaging, with strong adhesion between the dielectric and metal layers, meeting the long‑term stability requirements of aerospace and defense applications.

IV. Existing Process Challenges and Corresponding Solutions for Overcoming Them

Challenge 1: Gold wire bonding introduces parasitic inductance, leading to significant insertion loss and reduced bandwidth in the millimeter-wave frequency range.

✅ Breaks through the limitations of chip‑level planar conformal interconnects, eliminating arched lead frames; broadband insertion loss is kept below 1.3 dB across 5–20 GHz, with bandwidth performance surpassing that of commercial packages.

Challenge 2: LTCC/PCB packaging requires discrete chip capacitors, resulting in a large module footprint and cumbersome assembly.

✅ Breaks through the integration of in‑situ aerosol MIM capacitors, with a filter structure directly formed inside the package, eliminating surface‑mount and soldering steps and significantly boosting integration density.

Challenge 3: There is a height difference of several hundred micrometers between the chip and the substrate, leading to easy breakage of RF traces and significant signal reflections.

✅ Breaks through multi-angle aerosol rounded‑corner slope printing, ensuring smooth step transitions and eliminating abrupt reflections in RF signals.

Challenge 4: High‑dielectric barium titanate ink is difficult to uniformly blend with polymers, leading to delamination of the thin film.

✅ Dual‑path mist channels enable real-time turbulent mixing, ensuring uniform dispersion at the moment of printing; no phase separation occurs within the film, resulting in an excellent capacitance quality factor.

Challenge 5: Traditional multi-layer packaging involves numerous processes and long lead times, resulting in slow product iteration.

✅ A single aerosol device can fabricate a three-layer structure comprising dielectric, high‑k dielectric, and conductive layers; a complete package takes only 100 minutes, with rapid prototyping for design modifications.

V. Future Diversified Industrial Application Scenarios

  • Airborne/Satellite Millimeter-Wave Power Amplifier Module
Aerospace 5–20 GHz RF power amplifier, featuring a lightweight monolithic package and wire‑bond‑free, low‑loss design, suitable for satellite communications and airborne radar.
  • Automotive 77 GHz Millimeter-Wave Radar Front-End
Multi-channel power amplifier SiP system for automotive collision‑avoidance radar, with rapid custom encapsulation for aerosols, shortening the radar R&D iteration cycle.
  • 5G base station miniature RF transceiver chip
Miniaturized packaging for sub-6 GHz and Ku-band base station power amplifiers, coupled with low-cost additive manufacturing at scale, reduces base station hardware costs.
  • Portable RF detection instrument
The handheld spectrum analyzer and signal source feature a built-in microwave amplification module, while an integrated capacitor design further reduces the overall device footprint.
  • Rapid Prototyping Platform for University RF Laboratories
No LTCC production line or wire-bonding equipment is required; desktop aerosol‑based equipment enables rapid prototyping of various power amplifier and filter packages.
Image and Text Guide

Figure 1. (a) Exploded view of the packaging structure, illustrating the manufacturing process; (b) Cross-sectional view showing the layered material architecture.

Figure 2. Schematic diagrams of the package designs for two types of packaged components (Package 1 and Package 2), with dimensions in millimeters. The values in parentheses indicate the target material thicknesses: (a) polyimide (PI); (b) silver (Ag).

Figure 3. Capacitor configurations for the characterization of nanocomposites (dimensions in millimeters): (a) PI; (b) Ag

Figure 4. Schematic diagram of the AJP‑encapsulated 2× through‑hole design (dimensions in mm), corresponding to (a) the PI type and (b) the Ag type, respectively.

Table I: Measured Thickness of Printed Materials

Figure 5. Two fabricated package structures and one of the material characterization setups. (a) Bypass capacitor; (b) Packaged chip; (c) Perspective view of the package structures shown in (a) and (b); (d) Two-dimensional cross-sectional view; (e) Capacitor used for material characterization.

Figure 6. Measurement Setup Configuration

Figure 7. Measured capacitor parameters and extracted dielectric properties. Parasitic effects cause errors to increase with frequency. (a) Capacitance; (b) Dielectric constant εr; (c) Tan δ.

Table II: Comparison with State-of-the-Art AM Capacitors

Figure 8. Measured small-signal S-parameters of the AJP‑packaged chip, compared with those of the publicly available bare die [10] and a commercial off‑the‑shelf (COTS) packaged device [14]: (a) S11; (b) S12; (c) S22; (d) S21.

Figure 9: The 2x value obtained through measurement

Figure 10. Performance comparison between a package with doubled loss after layer removal and the bare die [10]

Figure 11. Large-signal load pull test results for AJP packages at an operating frequency of 8 GHz. (a) Package 1; (b) Package 2.

Table III: Comparison with Other AM Packages

Figure 12. Large-signal load pull test results of AJP packages at 9 GHz. (a) Package 1; (b) Package 2.

Figure 13. Large-signal load pull test results for AJP packages at a frequency of 10 GHz. (a) Package 1; (b) Package 2.

Figure 14. Large-signal load-pull test results for AJP packages at 11 GHz. (a) Package 1; (b) Package 2.

Figure 15. Deviations in performance as a function of power and temperature cycling. (a) Maximum gain; (b) Comparison of the initial gain measurement with the gain after 1,000 power cycles and after one, three, and seven temperature cycles.

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